LMS Linear Motor
Features:
- Closed loop control
- High speed
- Unlimited stroke
- Large thrust and high acceleration
- High accuracy and high repeatability
- Large holding force
- Low velocity ripple
LMC Linear Motor
Features:
- Closed loop control
- High accuracy / high repeatability
- Smooth motion
- Small inertia / high acceleration
- High speed up to 3.5 m/s
- Good for Semiconductor Industry
- Wafer Industry
Planar Motor
| Motor | Forcer: hybrid planar motor Stator: integral grid platen |
| Support | Air bearing |
| Position sensing | Direct feedback through position sensors in 3 axes (X1/X2/Y) |
| Control | Position: Direct feedback servo control of X, Y and yaw error Commutation control: Amplitude/phase control using 2-phase sine wave linear amplifier |
Gantry
Features:
- Continuous force 131.3N for each motor
- High speed:
1.5 m/sec (upper axis),
1.2 m/sec (lower axis) - Repeatability within 1 µm
- Resolution up to 1 µm
- Orthogonality less than 2 arc sec
Applications:
- Precision Optical Production
- Probe (PCB, Wafer, LCD, etc.)
- Wire Bonder
- Die Bonder
- Dispensing Machine
- Laser Cutting Machine
- Laser Via Machine
- Component Placement Machine
X-Y Robot
Features:
- Large thrust:
188 N (upper axis),
314 N (lower axis) - High speed:
1.5 m/sec (upper axis)
1.2 m/sec (lower axis) - Repeatability within 1 µm
- Resolution up to 1 µm
- Orthogonality 0.25 arc sec/25mm
Applications:
- Probe (PCB, Wafer, LCD, etc.)
- Wire Bonder
- Die Bonder
- Laser Marking Machine
- Component Placement Machine
- Coordinate Measuring Machine
- CNC Engraving Machine